High Precision Machining (Ceramic) Wafer Carrier/Chuck etc
Φ300 x t 2 Aluminum Oxide
Semiconductor Wafer Carrier
Parallelism: <1 μｍ
Flatness: < 1μｍ
No scratches ,no finger prints etc
100,150,200,300,450,675 mm standard stocked
Thin wafer, warping free
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