ESD Safe End Effector
Extra durable and low contact
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AMAT KLA, BRUKER
Internal Hollow Ceramic Plate
Cooling or heating channel integrated
Alumina Oxide or Aluminum Nitride Ceramic
Semiconductor wafer processing
300mm, 350mm, 450mm ...
Double sides working porous ceramic vacuum chuck table
Different pore sizes of the front and the back sides
Ceramic ,CBN, Diamond CMP Grinding Pad
Diamond grit size, pitch, surface flatness ,roughness etc customizable.
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Silicon Nitride Ceramic Components Machining ---For the most extreme environment
Silicon Nitride is one of the highest performing technical ceramics from across both the oxide and non-oxide groups. It was first developed in the 1960s when materials science and engineering was acknowledged as a field of study with comparable value to that of metallurgy. The underlying goal of most ceramics research in the ‘60s and ‘70s was to develop compact engineering materials with high strength, and toughness. Silicon nitride succeeded on all fronts.
Silicon Nitride—Chemistry & Microstructure
Silicon nitride is a ceramic that exists in three distinct crystallographic phases: α, β, and γ. Both alpha and beta-phase silicon nitride are comprised of corner-sharing, tetrahedral SiN4 with short, strong Si-N bonds. The result is an extremely rigid 3D framework of compactly layered silicon and nitrogen atoms.
The microstructure of silicon nitride ceramics is strongly dependent on the densification mechanism. Typically, α-Si3N4 is used as a starting powder as it transitions to the more chemically stable β-phase when fired. Although grain size and shape vary depending on the properties of the starting powder and the presence of additives, β-Si3N4 typically consists of elongated grains that interlock in a tightly compacted microstructure.
Low density (3.17 g/cm3)
High fracture toughness (7 MPa m1/2)
Excellent flexural strength (850 MPa)
Exceptional thermal shock resistance
High maximum operating temperatures
Silicon nitride can readily be deployed in some of the world’s toughest working environments, owing to its unique intersection of chemical and thermodynamic properties. Hot pressed silicon nitride offers excellent high-temperature performance and is ideal for seal face components challenging conditions, including boiler water reactor pumps, pressurized water reactor pumps, corrosive borated water service, and within rotating bearings.
Pump components comprised of silicon nitride are also used in the oil and gas sector, and throughout the petrochemical industry at large. The chemical integrity of Si3N4 makes it suitable for surfaces within pumps (impellers, shafts, seals, etc.) that routinely come into contact with abrasive slurries and corrosive fluids.
Canon Stepper Wafer Chuck
SiSiC pin chuck refurbishing ,recondition ,modification and duplication
CERAMERIC SiSiC Pin Chuck for Wafer Lithographic ,metrology etc high end application , ultra flat precision : global <300nm all through 12 inch ; local < 50nm within 30x30mm
ASML, Canon, Bruker, KLA ...
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Wafer Back Grinding ,Back Thinning Chuck Table
Recondition, modification and duplication
One stop solution from the expert
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Ceramic wafer carrier
200X2mm, semi transparent, front and back side flatness less than 5 um ; parallelism with 5um ,that is Cerameric ultra thin and flat wafer carrier
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