Tuesday, January 26, 2016

Porous Ceramic Vacuum Spin Table

Porous Ceramic Vacuum Spin Table

Our semixicon series poros ceramic vacuum spin table are designed to be used in spinners to hold thin fragile films, the advantage of our porous ceramic vacuum spin tables are :


  • Uniformed pore sizes and pore distributions for excellent “no blind spot” chucking force
  • Superior flat surface to prevent warping or wrinkling
  • Excellent thermal properties suitable for high speed spinning



semiXicon round porous ceramic spin table size matrix
Size
Pore size
Frame
2"
40,60
Alumina
4"
40,60
Alumina
5"
40,60
Alumina
6"
40,60
Alumina
8"
40,60
Alumina
12"
40,60
Alumina
18”
40,60
Alumina
semiXicon square porous ceramic spin table size matrix
Size
Pore Size
Frame
4" x 4"
40,60
Alumina,SUS
5" x 5"
40,60
Alumina,SUS
6" x 6"
40,60
Alumina,SUS
6" x 8"
40,60
Alumina,SUS
12" x 12"
40,60
Alumina,SUS
12" x 18"
40,60
Alumina,SUS
20" x 20"
40,60
Alumina,SUS
Flatness can be from 2 micron to 10 micron

Tuesday, January 19, 2016

Friday, January 15, 2016

Back Lit Vacuum Chuck

semiXicon is introducting a new sereis of back lit vacuum chucks,these vacuum chucks are installed LED back ling for easier inspection purpose.


Wednesday, January 13, 2016

Friday, January 8, 2016

Wednesday, January 6, 2016

High Porosity Chucks For Thin Films,fragile substrates and thermally sensitive materials

High Porosity Ceramic Vacuum Chuck


  • The semiXicon high porosity ceramic chuck table assembly provides a flat, smooth, uniform surface for maximum chucking capability. 

  • These features eliminate both deflection and the tendency to produce a pattern on the work piece

  • Chucks can be manufactured up to an 20” diameter with typical flatness within 0.005”.

  • Customers:

  • Semiconductor , Film manufacturers, photonic and MEMS ,battery etc

  • Applications:
  • - Semiconductor
  • Vacuum chucking of  wafers for subsequent manufacturing operations
  • Rotary vacuum chucks for the application of photo-sensitive liquid to substrate material for electronic and integrated circuitry components
  •  Film Manufacturing
  • Vacuum transfer platens on an automatic rotary index machine
  •  Transporting of film
  • Battery and new energy : Coating
  • Photonic : dicing ,inspection,polishing etc