Wednesday, January 6, 2016

High Porosity Chucks For Thin Films,fragile substrates and thermally sensitive materials

High Porosity Ceramic Vacuum Chuck


  • The semiXicon high porosity ceramic chuck table assembly provides a flat, smooth, uniform surface for maximum chucking capability. 

  • These features eliminate both deflection and the tendency to produce a pattern on the work piece

  • Chucks can be manufactured up to an 20” diameter with typical flatness within 0.005”.

  • Customers:

  • Semiconductor , Film manufacturers, photonic and MEMS ,battery etc

  • Applications:
  • - Semiconductor
  • Vacuum chucking of  wafers for subsequent manufacturing operations
  • Rotary vacuum chucks for the application of photo-sensitive liquid to substrate material for electronic and integrated circuitry components
  •  Film Manufacturing
  • Vacuum transfer platens on an automatic rotary index machine
  •  Transporting of film
  • Battery and new energy : Coating
  • Photonic : dicing ,inspection,polishing etc















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