High Porosity Ceramic Vacuum Chuck
- The semiXicon high porosity ceramic chuck table assembly provides a flat, smooth, uniform surface for maximum chucking capability.
- These features eliminate both deflection and the tendency to produce a pattern on the work piece
- Chucks can be manufactured up to an 20” diameter with typical flatness within 0.005”.
- Customers:
- Semiconductor , Film manufacturers, photonic and MEMS ,battery etc
- Applications:
- - Semiconductor
- Vacuum chucking of wafers for subsequent manufacturing operations
- Rotary vacuum chucks for the application of photo-sensitive liquid to substrate material for electronic and integrated circuitry components
- Film Manufacturing
- Vacuum transfer platens on an automatic rotary index machine
- Transporting of film
- Battery and new energy : Coating
- Photonic : dicing ,inspection,polishing etc
No comments:
Post a Comment