Wafer Chuck Tables

Porous ceramic semiconductor wafer vacuum chucks : one,deux,tres,quatro,fünf,六，שבע,восемь,negen,ਦਸ...

High thermal conductivity AlN Ø305X1.0 wafer made by semiXicon

High thermal conductivity  AlN Ø305X1.0 wafer made by semiXicon Dimension: 305 Diameter+/-0.15 Thickness: 1.0 mm+/-0.05 Surface Roughness: 0.3-0.6 Thermal conductivity at 20 C: >180 W.M.K. Semitransparent The semiXicon aluminum nitride (AlN) ceramic carries high thermal conductivity(5-10 times as the alumina ceramic), low dielectric constant and dissipation factor, good insulation and excellent mechanical properties, non-toxic, high thermal resistance, chemical resistance ,and the linear expansion coefficient is similar with Si,it goes with standard wafer sized such as 3,4,5,6,8,12 http://www.semixicon.com