Sapphire and Quartz Wafer Carrier

This high temperature tolerate and  low thermal expansion coefficient quartz material is widely used in semiconductor, medical science, communications, lasers, infrared, electronics, measuring instruments, military, aerospace and others high-tech industry.

Semixicon is specialized in manufacturing wafer handling tools such as sapphire and quartz wafer carriers etc.

Equip. Name	OEM  P/N	DESCRIPTION	MATERIAL
GaSonics-A1000	A06-005-01	SHOWER HEAD	QUARTZ
GaSonics-A1000	A06-012-01	DIFFUSION DISK	QUARTZ
GaSonics-A1000	A06-001-01	CHAMBER WINDOW	QUARTZ
GaSonics-A1000	A06-010-01	PLASMA TUBE	QUARTZ
AMAT P5000	0200-10243	SHADOW RING	QUARTZ
AMAT P5000	0200-09610	0UTER RING	QUARTZ
AMAT P5000	0200-09557	FOCUS RING	QUARTZ
AMAT P5000	0200-09558	EDGE RING	QUARTZ
AMAT P5000	0200-09158	CHAMBER WINDOW	QUARTZ
AMAT P5000	0200-09216	PEDESTAL RING	QUARTZ
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Wafer Grinding Chuck for DISCO 83H/6 Wafer Grinder

Transparent Vacuum Chuck Table for Semiconductor Wafer

Transparent Vacuum Chuck Table for Semiconductor Wafer

This patent pending and customer awarded transparent vacuum chuck table for semiconductor wafer processing allows full optical access to the wafer,this is opening a convenient door to some process which traditional porous chuck hold back.

Various kind of light sources can be also integrated in the design.