AMAT Part Supply List by SEMIXICON

DETAILED PROCESS	Equip. Maker	Equip. Name	OEM  P/N	DESCRIPTION	MATERIAL
	AMAT		0020-01640	SHIELD,INSULATOR	CERAMIC
PVD	AMAT	ENDURA 5500	0020-20114	ISOLATOR DC BIOS	CERAMIC
	AMAT		0020-20123		CERAMIC
PVD	AMAT	ENDURA 5500	0020-20126	STAND OFF CERAMIC DC BIOS	CERAMIC
	AMAT		0020-29164	INSULATOR BOTTOM ON CAPSULE	CERAMIC
	AMAT		0022-48198	BUSH, CERAMIC AC PIN	CERAMIC
	AMAT		0022-50202	TOP PLATE, DUMMY PUCK, MPVD	CERAMIC
	AMAT		0022-50218	BOTTOM PLATE, DUMMY PUCK, MPVD	CERAMIC
	AMAT		0022-50410	SPACER, DUMMY PUCK, MPVD	CERAMIC
	AMAT		0022-52740	counter groove	Tungsten
	AMAT		0022-64115	liner alumina	CERAMIC
ETCH	AMAT	DPS METAL	0200-00247	RING CAPTURE,195MM SNNF CERAMIC,DPS	CERAMIC
CVD	AMAT	P-5000 DXZ	0200-00296	SLEEVE JUNCTION SIN, DXZ	CERAMIC
	AMAT		0200-00318	GUIDE LIFT PIN SST HEATER 300MM TXZ	CERAMIC
CVD	AMAT	CENTURA 5200	0200-00353	SPACER PIN WxZ+HEATER	CERAMIC
PVD	AMAT	ENDURA 5500	0200-00354	RING, PURGE WxZ +FC NOTCH	CERAMIC
CVD	AMAT	ULTIMA	0200-00576	PIN, WEIGHT 300MM HDP-CVD	CERAMIC
	AMAT		0200-00635	NOZZLE, ALL CERAMIC 2.28L, 300MM HDP CVD	CERAMIC
	AMAT		0200-00710	ISOLATOR, CERAMIC, WXZ EC	CERAMIC
	AMAT		0200-00911	LABYRINTH FEEDTHRU COIL SUPORT ELECTRA	CERAMIC
	AMAT		0200-01196	LIFT PIN FAST LIFT, ALUMINA NON-CONDUCTIVE,100DIA	CERAMIC
	AMAT		0200-01197	LIFT PIN, ADJUST FAST LIFT, ALUMINA NON-CONDUCTIVE,100DIA	CERAMIC
	AMAT		0200-01368	INJICTOR CERAMIC CAS eMAX SAMSUNG	CERAMIC
	AMAT		0200-01798	PIN LIFT,TXZ HEATER SINGLE TAPER,CERAMIC	CERAMIC
	AMAT		0200-01844	INJECTOR,GAS 12 HOLES, .020 DIA, 1.02	CERAMIC
	AMAT		0200-01845	INJECTOR, GAS, 12 HOLES, .020 DIA, 1.02	CERAMIC
	AMAT		0200-01904	PIN PEDESTAL ALIGNMENT CERAMIC 300MM PCII	CERAMIC
	AMAT		0200-02113	BUSHING,UP,SHIELD,INS,300MM SIP ENCORE TA(N)	CERAMIC
	AMAT	E-MAX	0200-02116	INJECTION,GAS HOLES, .020 DIA , 1.02 LG 63RA, INNER	CERAMIC
	AMAT	E-MAX	0200-02117	INJICTOR GAS SEAL,BLANK-OFF,CERAMIC eMAX	CERAMIC
	AMAT		0200-02121	INSULATOR FEEDTHRU,300MM SIP ENCORE TA(N)	CERAMIC
	AMAT		0200-02139	PIN ,COVER CAPTIVE SCREW,300MM SIP ENCORE TA(N)	CERAMIC
	AMAT		0200-02145	CAP,COIL SUPPORT ,300MM SIP ENCORE TA(N)	CERAMIC
	AMAT		0200-02781	PIN, LIFT, PRODUCERE	CERAMIC
	AMAT	DPS METAL	0200-04131	CAPTURE RING	CERAMIC
	AMAT		0200-04132	FOCUS RING	CERAMIC
	AMAT		0200-06404	LID CERAMIC DUAL GAS FEED 300MMDPS 232	CERAMIC
CVD	AMAT	P-5000 DXZ	0200-09035	PIN, WAFER LIFT	CERAMIC
	AMAT		0200-09046-2-CP01	ARM PAD	CERAMIC
	AMAT		0200-09046-3-CP01	ARM PIN	CERAMIC
	AMAT		0200-09046-CP01	ARM SUSCEPTOR	CERAMIC
CVD	AMAT	DSM	0200-09071	PIN WAFER LIFT 200MM	CERAMIC
CVD	AMAT	P-5000 DXZ	0200-09147	PIN WAFER LIFT 150 WB	CERAMIC
	AMAT		0200-09240--2-CP01	ARM PAD	CERAMIC
	AMAT		0200-09240-CP01	SUPPORT ATM SUSCEPTOR, 200MM	CERAMIC
	AMAT		0200-09240-CP01	ARM PIN	CERAMIC
	AMAT		0200-09384	PIN WAFER LIFT UNIVERSAL CHAMBER, 150 MM	CERAMIC
CVD	AMAT		0200-09414	COLLAR .271 SUS BWCVD	CERAMIC
CVD	AMAT		0200-09415	BUSHING .271 SUS BWCVD	CERAMIC
	AMAT		0200-09452	ARM, T2WELDED SUSCEPTOR	CERAMIC
	AMAT		0200-09575	PIN, WAFER LIFT, REV1 CERAMIC HOOP, 200MM	CERAMIC
BWCVD	AMAT		0200-09614	PIN, LIFT WAFER 200MM BWCVD	CERAMIC
CVD	AMAT	CENTURA 5200	0200-09716	PIN LIFT, HEATER WxZ	CERAMIC
ETCH	AMAT	P5000 METAL	0200-09735	COVER,CLAMPING RING, 150MM	CERAMIC
	AMAT		0200-09757	RING	CERAMIC
ETCH	AMAT	P5000 METAL	0200-09759	SHIELD,150MM,PEDESTAL,AL,FINGER	CERAMIC
CVD	AMAT		0200-09886	FINGER "6" MCVD	CERAMIC
CVD	AMAT	P5000	0200-09933	PIN, WAFER LIFT, HEATER	CERAMIC
	AMAT		0200-09951	PAD WAFER LIFT RING WXZ	CERAMIC
	AMAT		0200-09974	DXZ TEOS PUMPING RING	CERAMIC
	AMAT	METAL ETCH 5000	0200-10027	RING, INNER, 1.50", SGD	CERAMIC
	AMAT		0200-10117	ARM	CERAMIC
DXZ	AMAT		0200-10143	Insert, Ring Ceramic, DXZ Chamber	CERAMIC
	AMAT		0200-10157	LINER, JUNCTION	CERAMIC
CVD	AMAT	CENTURA 5200 DXZ SION	0200-10158	OBS SLEEVE, JUNCTION SIN, DXZ	CERAMIC
CVD	AMAT	CENTURA 5200 DXZ SION	0200-10163	ISOLATOR, Sin ENHANCED, PUMPING LID, DXZ	CERAMIC
	AMAT		0200-10164	SIN PUMPING INSERT	CERAMIC
	AMAT		0200-10169	EDGE RING	CERAMIC
	AMAT		0200-10192	Ring focus ESC 8''	CERAMIC
	AMAT		0200-10204	PIN, WAFER LIFT, UNIV CH, METAL HOOP, 150 mm, P-CHUCK	CERAMIC
	AMAT		0200-10284	LIFT PIN	CERAMIC
	AMAT		0200-10676	SUPPORT SUSCEPTOR 150MM TO/SO/N	CERAMIC
	AMAT		0200-17666	WAFER NAILHEAD LIFT PIN, 300MM CATHODE DS	CERAMIC
	AMAT		0200-17725	CATHODE LINER SCREW COVER SAMURAI	CERAMIC
HDPCVD	AMAT	DSM	0200-18053	GUIDE LIFT PIN	CERAMIC
CVD	AMAT	ULTIMA	0200-18081	COVER LOW PROFILE HDP-CVD, ULTIMA	CERAMIC
CVD	AMAT	ULTIMA	0200-18086	NOZZLE ALL CERAMIC .85L HDP-CVD, ULTIMA	CERAMIC
CVD	AMAT	ULTIMA	0200-18093	NOZZLE ALL CERAMIC 2.55L, 1.5% HDP-CVD, ULTIMA	CERAMIC
CVD	AMAT	HDP	0200-18100	LIFT PIN CERAMIC 300MM, HDPCVD	CERAMIC
CVD	AMAT	ULTIMA	0200-18109	COLLAR 200mm SNNF SML FLT ULTIMA HDPCVD	CERAMIC
	AMAT		0200-18701	SHADOW RING INSERT, DIA 297 MM, 210 GRAM - DS	CERAMIC
	AMAT		0200-19002	SHADOW RING HEAT SHIELD. 2 - PCE RING - DS	CERAMIC
	AMAT		0200-19003	Shadow Ring Carrier, 300 mm DS	CERAMIC
	AMAT		0200-19038	SHADOW RING INSERT, DIA 295 MM, 210 GRAM - DS	CERAMIC
	AMAT		0200-20123		CERAMIC
	AMAT	VECTOR-IMP	0200-20215	HOUSING DOUBLE RF CONNECTORS,VECTRA-IMP	CERAMIC
PVD	AMAT	E-5500 VHP-TXZ	0200-20216	PIN COVER RF SCREW,VECTRA-IMP	CERAMIC
PVD	AMAT	E-5500 VHP-TXZ	0200-20315	REST BUTTON B101 VECTRA IMP	CERAMIC
	AMAT	IMP	0200-20439	INSULATOR RIGID COIL SUPPORT, ELECTRA-IMP	CERAMIC
	AMAT	IMP	0200-20440	REST BUTTON 300MM VECTRA IMP	CERAMIC
	AMAT		0200-20441	SUCEPTOR CENTER, VENTED,PEDESTAL,B101 300MM	CERAMIC
	AMAT		0200-20492	INSULATOR RECEPTACLE RIGID SUPPORT VECTRA-IMP,ICE	CERAMIC
	AMAT		0200-21868	NOZZLE INSERT SG SOLID 300MM - DS	CERAMIC
	AMAT		0200-22972	COVER RING (0.2mmEE)	CERAMIC
	AMAT		0200-22973	Cover Ring (0.1mmEE)	CERAMIC
	AMAT		0200-23049	Cover Ring (0.5MM EE), 150MM Wafer, 57.5MM Flat	CERAMIC
	AMAT		0200-23094	FINGER LH 34MM HEIGHT	CERAMIC
	AMAT		0200-23095	FINGER LH 26MM HEIGHT	CERAMIC
	AMAT		0200-23096	FINGER RH 34MM HEIGHT	CERAMIC
	AMAT		0200-23097	FINGER RH, 26MM HEIGHT	CERAMIC
	AMAT		0200-23098	FINGER CENTER 34MM HEIGHT	CERAMIC
	AMAT		0200-23099	FINGER CENTER 34MM HEIGHT	CERAMIC
	AMAT		0200-23164	Shadow Ring Carrier, 200 mm DS	CERAMIC
	AMAT		0200-23441	SHADOW RING INSERT, DIA 197 MM	CERAMIC
	AMAT		0200-23655	RING, DEPOSITION, PVD W, CLEANCOAT ALUMINA 300 MM	CERAMIC
	AMAT		0200-23665	SHADOW RING HEAT SHIELD. 2 - PCE RING - DS	CERAMIC
	AMAT		0200-23666	FINGER SLIDING AL203	CERAMIC
	AMAT		0200-23849	SHADOW RING, 2.50 MM EDGE, NOTCH TSV, 300 MM	CERAMIC
	AMAT		0200-23850	SHADOW RING, 3.00 MM EDGE, NOTCH TSV, 300 MM	CERAMIC
	AMAT		0200-24716	300MM ESC LIFTING SCREW CAP	CERAMIC
	AMAT		0200-24903	ESC INSULATOR, 300MM CATHODE DS	CERAMIC
	AMAT		0200-24917	LIFT PIN GUIDE, ESC SAMURAI	CERAMIC
	AMAT		0200-25446	BUSH, CERAMIC DC PIN	CERAMIC
	AMAT		0200-25488	BUSH, CERAMIC DC PIN	CERAMIC
	AMAT		0200-25506	CERAMIC ROD CENTERING	CERAMIC
	AMAT		0200-25716	CERAMIC ROD CENTERING	CERAMIC
	AMAT		0200-26107	ESC EDGE INSULATOR, CATHODE DS	CERAMIC
	AMAT		0200-26129	ESC INSULATOR, 300MM CATHODE DS	CERAMIC
	AMAT		0200-26199	CERAMIC ROD CENTERING	CERAMIC
	AMAT		0200-26557	BOTTOM RING	CERAMIC
	AMAT		0200-26558	TOP RING	CERAMIC
	AMAT		0200-26738	ISOLATOR, CERAMIC, LOWK, 300MM PRODUCER	CERAMIC
	AMAT		0200-27075	centering rod	CERAMIC
	AMAT		0200-27124	SHADOW RING INSERT, DIA 196 MM	CERAMIC
	AMAT		0200-27135	REWORK, ADAPTER	CERAMIC
	AMAT		0200-27235	SHADOW RING HEAT SHIELD DIA 196MM - DS	CERAMIC
	AMAT		0200-27494	ALN DISC, 300MM NOTCHED	CERAMIC
	AMAT		0200-27495	ALN DISC, 500MM	CERAMIC
	AMAT		0200-27497	ALN DISC, 501MM	CERAMIC
	AMAT		0200-29164	INSULATOR BOTTOM ON CAPSULE	CERAMIC
Metal Etching	AMAT	DPS METAL	0200-35290	HOUSING, GAS FEED NOZZLE DPS MEC CHAMBER	CERAMIC
Metal Etching	AMAT	DPS METAL	0200-35291	PLUG, INNER, GAS FEED ASSY, DPS A1	CERAMIC
Poly etching	AMAT	DPS POLY	0200-35295	HOUSING, GAS FEED DPS POLY	CERAMIC
Poly etching	AMAT	DPS POLY	0200-35296	PLUG,INNER,GAS FEED ASSY,DPS PC	CERAMIC
	AMAT	DPS METAL	0200-35323	RING,CAPTURE 195MM SEMI NOTCH NO FLAT  CERAMIC DPS CHAMBR	CERAMIC
	AMAT		0200-35702	CXZ EDGE RING	CERAMIC
	AMAT	DSM	0200-36373	LIFT PIN .149 DIA TRIANGULAR	CERAMIC
	AMAT		0200-36415	C-SHAPE RING	CERAMIC
	AMAT		0200-36416	BOTTOM RING	CERAMIC
	AMAT		0200-36418	COVER PUMPING RING	CERAMIC
	AMAT		0200-36428	TUBE CERAMIC GAS FEED,MICROWAVE CLEAN	CERAMIC
	AMAT		0200-36630	PLATE, COVER, 8'' HEATER, DxZ ALUMINUM NITRIDE	CERAMIC
	AMAT		0200-36631	PLATE, COVER, 8'' HEATER, DxZ ALUMINUM NITRIDE	CERAMIC
	AMAT		0200-36649	LIFT RING	CERAMIC
	AMAT	OXIDE ETCH 5000	0200-36699	LIFT PIN FAST LIFT, ALUMINA NON-CONDUCTIVE	CERAMIC
	AMAT	OXIDE ETCH 5000	0200-36700	LIFT PIN, ADJUST FAST LIFT, ALUMINA NON-CONDUCTIVE	CERAMIC
	AMAT		0200-39140	RING,FOCUS, 195MM SNNF 1", 60DEG, DPS	CERAMIC
	AMAT		0200-39324	CHM INSERT	CERAMIC
	AMAT		0200-39361	PRODUCER PUMPING RING	CERAMIC
Oxide etching	AMAT	HDP	0200-40156	LIFT PIN, CERAMIC, LONG	CERAMIC
	AMAT		0200-71871	ROLLER LIFT PIN 15K/25K	CERAMIC
	AMAT		0200-71872	PIN, ROLLER BUSHING 15K/25K	CERAMIC
	AMAT		0200-71873	PIN END GROOVED ROLLER BUSHING 15K/25K	CERAMIC
	AMAT		0200-71880	BUSHING ROLLER, LIFT PIN15K/25K	CERAMIC
	AMAT		0200-71894	ROLLER LIFT PIN 15KP & 40K	CERAMIC
	AMAT		0200-72122		CERAMIC
	AMAT		0200-76048	CERAMIC WASHER FINGER INSULATOR 101 HOOP	CERAMIC
	AMAT		0270-11512	DUMMY, PUCK PLATE, MPVD	CERAMIC

sales@semixicon.com