12 Inch Wafer Inspection Vacuum Chuck System

12 Inch Wafer Inspection Vacuum Chuck System

MOENR153--A 6 " Chuck Table

MOENR153--A-96G-003   6 " Ceramic Chuck Table

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We can repair,recondition your ceramic chuck of any brand or build a new one for you with better lead time ,same quality and of course better price.

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Porous ceramic vavuum chuck table

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MicroAutomation 1006 Chuck

MicroAutomation 1006 wafer chuck

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6 inch square porous ceramic vacuum chuck table assy

6 inch square porous ceramic vacuum chuck table assy

Application:

Semiconductor

Optical

Laser

Solar

Coating

...

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Repair the chuck unrepairable,accomplish the mission impossible

We are repairing the below chuck table which DISCO is discontinuing to repair due to various of reasons:

ﾁｬｯｸﾃｰﾌﾞﾙ Chuck table	FKWK-160004	ﾎｯﾄﾃ-ﾌﾞﾙASSY(HP306)	HOT TABLE ASSY(HP306)
	FKWK-180001	ﾎｯﾄﾃ-ﾌﾞﾙASSY(HC328)	HOT TABLE ASSY(HC328)
	FRDB-010012	ﾁｬｯｸﾃ-ﾌﾞﾙ(HC)	CHUCK TABLE(HC)
	FRDB-010013	ﾁｬｯｸﾃ-ﾌﾞﾙ(HC)	CHUCK TABLE(HC)
	LDDN-910005	ﾁﾔﾂｸ ﾃｰﾌﾞﾙ (ﾕﾆﾊﾞｰｻﾙ)	CHUCK TABLE (UNIVERSAL)
	FELS-910012	SPINNER TABLE	SPINNER TABLE
	LKRH-010028	ﾄﾗﾝｽﾌｱ- ﾃ-ﾌﾞﾙ(ﾒﾀﾙ ﾒﾂ	TRANSFER TABLE (METAL MESH)
	LPFB-510009	ﾁｬｯｸﾃ-ﾌﾞﾙ(UNV190X190)	CHUCK TABLE(UNV190X190)
	MODDN005	ﾁﾔﾂｸ ﾃ-ﾌﾞﾙ	CHUCK TABLE
	MAENR012	ﾃｰﾌﾞﾙ ASSY	TABLE ASSY
	FELS-910012	SPINNER TABLE	SPINNER TABLE

Repair the chuck unrepairable,accomplish the mission impossible

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Aluminium Nitride

High thermal conductivity (170-230W/mK), up to 9.5 times than that of Alumina Similar coefficient of thermal expansion to that of silicon (Si). This helps to      achieve high reliability of Si chip and thermal heat cycling Higher electric insulation, and Smaller dielectric constant Higher mechanical strength (450MPa). Superior corrosion resistance against molten metal. Very high purity, no toxicity

 AlN Property Characteristics

Item / Unit				Type
				AN-170	AN-200	AN-230
Color			-	Grey	Grey	Beige
Material				AlN	AlN	AlN
Reflectivity			%	-	-	-
Bulk density			g/cm3	3.30	3.28	3.25
Surface roughness			µm	0.3	0.5	-
Mechanical  characteristic	3-point bending strength		MPa	450	400	300
	Young's modulus		GPa	320	320	-
	Vickers hardness		GPa	11	11	-
Thermal  characteristic	Coefficient of  thermal expansion	40-400℃	×10-6/K	4.8	4.8	4.8
		40-800℃	×10-6/K	5.4	5.4	5.4
	Thermal  conductivity	25℃	W/(m・K)	180	200	230
		300℃	W/(m・K)	120	130	145
	Specific heat		J/(kg・K)	720	720	720
Electric  characteristic	Dielectric constant	1MHz	-	9.0	9.0	9.0
	Dielectric Loss	1MHz	×10-4	3	3	3
	Volume resistivity	25℃	Ω・cm	> 1014	> 1013	> 1013
		300℃	Ω・cm	1010	109	109
		500℃	Ω・cm	108	107	107
	Dielectric breakdown voltage		kV/mm	> 15	> 15	> 15

Aluminium Nitride (AlN) Ceramic

 Aluminium nitride characteristics include:

• Very good thermal conductivity
• Thermal expansion coefficient similar to that of Silicon
• Good dielectric properties
• Good corrosion resistance
• Stability in semiconductor processing atmospheres

AlN Ceramic Disc

Diameter : 6 inch

Thickness: 18mm

Lead time: in stock

MOQ:        1 nos

Price:  sales@semixicon.com

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Aluminum Nitride Substrate

Aluminum Nitride Substrate

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Features： High thermal conductivity, 7 to 8 times as much as alumina Thermal expansion is close to silicon wafer High insulation resistance High density and high mechanical strength Good chemical durability
Applications： Power modulus, IGBT, MOSFET,.. High power LED package LED chip submount
Characteristics of Material：
Item Material AlN Appearance - Gray Bulk density g /c.c. 3.3 Thermal characteristics Thermal conductivity W/mk 170 Coefficient of linear thermal expansion ×10-6/℃ RT ~ 800℃ 4.4 Electrical characteristics Dielectric strength V/m 14*106 Volume resistivity Ohm．cm >1014 Dielectric constant 1 MHz 8.7 Dielectric loss angle 1 MHz (×10-4) 2.5 Mechanical characteristics Flexure strength Mpa 450 Young’s modulus GPa 320
General Dimensional Specification：
Item Standard Premium Premium Max. 4.5” × 4.5” Max. 4.5” × 4.5” Thickness as-fired 0.4 ~ 1.0 mm Lapped 0.25 ~ 1.0mm Dimensions tolerance ± 1% NLT ± 0.1mm ± 1% NLT ± 0.1mm Thickness tolerance ± 10% ± 0.02mm Warp tolerance ≦ 0.003mm/mm ≦ 0.0015mm/mm Surface roughness 0.3 ~ 0.9μm, as fired < 0.08μm, polished
Characteristics Comparison (AlN/Al2O3) ：
Thermal Characteristics ：
Thermal Conductivity VS. Temperature ：

Aluminum Nitride Ceramic Part Number

ALN CERAMIC

Part #	Dimension  (inch)	Dimension (mm)	Thickness (mm)	MOQ (ea)	Lead Time ( Days)
5192001	2*2	50.8*50.8	0.5	1	7
5192002	2*2	50.8*50.8	1	1	7
5193001	3*3	76.2*76.2	0.5	1	7
5193002	3*3	76.2*76.2	1	1	7
5194001	4*4	101.6*101.6	0.5	1	7
5194002	4*4	101.6*101.6	1	1	7
5194501	4.5*4.5	114.3*114.3	0.5	1	7
5194502	4.5*4.5	114.3*114.3	1	1	7
5196001	6*6	152.4*152.4	0.5	1	15
5196002	6*6	152.4*152.4	1	1	15
5198001	8*8	203.2*203.2	0.5	1	30
5198002	8*8	203.2*203.2	1	1	30
5191201	12*12	304.8*304.8	0.5	1	60
5191202	12*12	304.8*304.8	1	1	60
5182001	2	Φ50.8	1	1	7
5182002	2	Φ50.8	1.5	1	7
5182003	2	Φ50.8	2	1	7
5182004	2	Φ50.8	2.5	1	7
5183001	3	Φ76.2	1	1	7
5183002	3	Φ76.2	1.5	1	7
5183004	3	Φ76.2	2	1	7
5183005	3	Φ76.2	2.5	1	7
5184001	4	Φ101.6	1	1	7
5184002	4	Φ101.6	1.5	1	7
5184003	4	Φ101.6	2	1	7
5184004	4	Φ101.6	2.5	1	7
5185001	5	Φ127	1	1	15
5185002	5	Φ127	1.5	1	15
5185003	5	Φ127	2	1	15
5185004	5	Φ127	2.5	1	15
5186001	6	Φ152.4	1	1	30
5186002	6	Φ152.4	1.5	1	30
5186003	6	Φ152.4	2	1	30
5186004	6	Φ152.4	2.5	1	30
5188001	8	Φ203.2	1	1	60
5188002	8	Φ203.2	1.5	1	60
5188003	8	Φ203.2	2	1	60
5188004	8	Φ203.2	2.5	1	60
5181201	12	Φ304.8	1	1	60
5181203	12	Φ304.9	2	1	60

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