Porous ceramic collets

Semixicon Porous Chuck in high accuracy non contact metrology inspection systems

Semixicon Porous Chuck
in high accuracy non contact metrology  inspection systems

SEMIXICON CHUCK TABLE INSIDE!

From USA to Europe,from Japan to China, in every wafer dicing machine and grinder ,you will always find: SEMIXICON CHUCK TABLE INSIDE!

SiC & SiSiC Wafer Chuck Table

SemiXicon wafer chucks made of SiC or SiSiC has superior rapid cooling and heating resistance ,wear resistance,extra long service life etc properties, it is almost the lightest ,but also the hardest ceramic material with similar thermal expansion rate with silicon etc compound wafers ,plus it is very resistant to acids and chemicals ,this makes it an excellent choice in some harsh wafer handling process

www.semixicon.com

Transparent Silicon Nitride

AMAT ceramic or quartz covers and rings etc

Semixicon  Available Part Number List for semi                                          sales@semixicon.com
NO	Description	Equipment		P/N	Material	Size
1	8” FOCUS RING	TEL	DRM2	1D10-309946-12	Silicon(Ring)	8"
2	Focus Inner 8” Notch C	TEL	Unity2E-851EM	1810-323881-14	Silicon(Ring)	8"
3	8” FOCUS RING	TEL	DRM2	1D10-309946-12	Silicon(Ring)	8"
4	Collar 300mm, 5.4mm Producer Etch	AMAT		0200-03575	Silicon(Ring)	12"
5	Focus Ring	TEL	RBM	2L10-255346-11	Silicon(Ring)	12"
6	INSERT RING, SILICON 200MM NOTCH(2)	AMAT		0200-01239	Silicon(Ring)	8"
7	LIFT PIN QUARTZ W/CAPTURING 300MM PRODUCER RPA WCLN	AMAT		0200-23879 Rev.01	Quartz
8	Window, Upper Qall EPD(H)(QUARTZ)	TEL		1D05-400101-11	Quartz
9	GLASS PLATE, EPD(QUARTZ)	TEL		1D10-409580-11	Quartz
10	RING INSULATOR B2(QUARTZ)	TEL		1D05-300053-14	Quartz	8"
11	RING INSULATOR A7(QUARTZ)	TEL		1D05-300052-13	Quartz	8"
12	WINDOW FRONT MICROWAVE REMOTE PLASMA	AMAT		0200-09952	Sapphire	D127*9.144T
13	WINDOW, SAPPHIRE, SIDE, CHAMBER	AMAT		0200-10100	Sapphire	D17.27*3.18T
14	Window Slit sapphire	AMAT		0200-00249	Sapphire	88.9*18.54*6.35T
15	WINDOW, IEP 300MM DPS2 (sapphire)	AMAT		0200-01195	Sapphire	D15.83*3.18T
16	WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ	AMAT		0200-09969	Sapphire	D17.27*3.18T
17	IEP Window Sapphire Gas Injector	LAM	2300 Versys Kiyo 300mm	716-008608-001	Sapphire	D25*0.87T
18	WDO SAPPHIRE LENS 25MM DIA X 2MM THK	AMAT		3440-01037	Sapphire	D25*1T
19	WINDOW, SAPPHIRE, PUMPING PLATE	AMAT		0200-09970	Sapphire	D40.64*3.05T
20	Window Sapphire / VIEWPORT, SAPPHIRE CONCEPT 1	NOVELLUS		15-110411-00	Sapphire	260.35*76.2*6.35T
21	Window Sapphire / WINDOW, 2.75 DIA, SAPPHIRE, DPS CHAMBER	AMAT		0200-35957	Sapphire	2.75 Dia x .125
22	Sapphire plug	LAM		716-331128-008	Sapphire
23	Window Depo SAF 0.5	TEL		1D10-406499-11	Sapphire
24	Sapphire Tube Replacement Kit	AMAT		3750-01144	Sapphire
25	PIN,MCA,SAPH,3/16DIA,0.8147IN,1 FLAT END	NOVELLUS		15-391861-32	Sapphire	all length & shape possible
26	SHIM, LIFT PIN, THICKNESS, SAPPHIRE LIFT PIN, THICKNESS, SAPPHIRE	NOVELLUS		15-260932-07-B	Sapphire
27	Mount sensor	NOVELLUS		15-11084-00	Sapphire
28	Sapphire Pin Pusher Adjustment	TEL		2L10-358376-11	Sapphire	D2.99*112.6L
29	Top Nozzle HDP CVD Ultima NOZZLE 4HOLE 60DEG, BAFFLE ULTIMA HDP-CVD	AMAT	ULTIMA	0200-01009	Al2O3
30	300mm HDP ALN 8  holes top nozzle Baffle, aln, 2.470dx1.14l, 8x.100cln,8x	AMAT		0200-04294	AlN
31	Gas Injector	LAM	2300 Versys Kiyo 300mm	716-082886-006	Y2O3
32	NOZZLE, ALN, 1.76L X .14DIA -N	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-04988	AlN->Sapphire
33	ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.14DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05081	AlN->Sapphire	any gas flow possible
34	ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.20DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05086	AlN->Sapphire	any gas flow possible
35	ULTIMA-X SIDE NOZ ZLE, ALN, 2.55LX0.20DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05091	AlN->Sapphire	any gas flow possible
36	ULTIMA-X SIDE NOZ ZLE, ALN, 2.28LX0.14DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05112	AlN->Sapphire	any gas flow possible
37	INJECTOR TUBE STAR INSERT 1.375	NOVELLUS	SPEED HDP-CVD	15-278968-00	Sapphire
38	NOZ, GAS NJ, 8-HOLE QTZ, 200ME	LAM		716-008718-001	Quartz->Sapphire
39	INJ, DUAL, FACSEAL, IEP, HNYCMB, CER	LAM		716-057993-003	Y2O3, Sapphire
40	INJ, DUAL, FACSEAL, IEP, HNYCMB, CER	LAM		716-057993-335	Y2O3, Sapphire
41	HPQ injector NOZ, INJ, 8X,0.55-45DE	AMAT	2300 Versys Kiyo 300	716-012639-024	l2O3, Quartz, Sapphire
42	Window Shield Depo Y1-E(Ceramic)	TEL		1D10-315649-12	Al2O3
43	RING INSULATOR B3(CERAMIC)	TEL		1D10-30410-12	Al2O3
44	Assy. Holder, MOER Ring	NOVELLUS		02-054574-00	Al2O3
45	GUIDE, LIFT PIN	AMAT		0200-18053	Al2O3
46	LIFT PIN, CERAMIC, LONG	AMAT		0200-40156	Al2O3
47	BUSHING UPPER SHIELD UPPER INS	AMAT		0200-00590	Al2O3
48	HOUSING DOUBLE RF CONN 300MM SIP ENCORE	AMAT		0200-07448 Re.4	Al2O3

Quartz ceramic