Semixicon Available Part Number List for semi sales@semixicon.com | ||||||
NO | Description | Equipment | P/N | Material | Size | |
1 | 8” FOCUS RING | TEL | DRM2 | 1D10-309946-12 | Silicon(Ring) | 8" |
2 | Focus Inner 8” Notch C | TEL | Unity2E-851EM | 1810-323881-14 | Silicon(Ring) | 8" |
3 | 8” FOCUS RING | TEL | DRM2 | 1D10-309946-12 | Silicon(Ring) | 8" |
4 | Collar 300mm, 5.4mm Producer Etch | AMAT | 0200-03575 | Silicon(Ring) | 12" | |
5 | Focus Ring | TEL | RBM | 2L10-255346-11 | Silicon(Ring) | 12" |
6 | INSERT RING, SILICON 200MM NOTCH(2) | AMAT | 0200-01239 | Silicon(Ring) | 8" | |
7 | LIFT PIN QUARTZ W/CAPTURING 300MM PRODUCER RPA WCLN | AMAT | 0200-23879 Rev.01 | Quartz | ||
8 | Window, Upper Qall EPD(H)(QUARTZ) | TEL | 1D05-400101-11 | Quartz | ||
9 | GLASS PLATE, EPD(QUARTZ) | TEL | 1D10-409580-11 | Quartz | ||
10 | RING INSULATOR B2(QUARTZ) | TEL | 1D05-300053-14 | Quartz | 8" | |
11 | RING INSULATOR A7(QUARTZ) | TEL | 1D05-300052-13 | Quartz | 8" | |
12 | WINDOW FRONT MICROWAVE REMOTE PLASMA | AMAT | 0200-09952 | Sapphire | D127*9.144T | |
13 | WINDOW, SAPPHIRE, SIDE, CHAMBER | AMAT | 0200-10100 | Sapphire | D17.27*3.18T | |
14 | Window Slit sapphire | AMAT | 0200-00249 | Sapphire | 88.9*18.54*6.35T | |
15 | WINDOW, IEP 300MM DPS2 (sapphire) | AMAT | 0200-01195 | Sapphire | D15.83*3.18T | |
16 | WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ | AMAT | 0200-09969 | Sapphire | D17.27*3.18T | |
17 | IEP Window Sapphire Gas Injector | LAM | 2300 Versys Kiyo 300mm | 716-008608-001 | Sapphire | D25*0.87T |
18 | WDO SAPPHIRE LENS 25MM DIA X 2MM THK | AMAT | 3440-01037 | Sapphire | D25*1T | |
19 | WINDOW, SAPPHIRE, PUMPING PLATE | AMAT | 0200-09970 | Sapphire | D40.64*3.05T | |
20 | Window Sapphire / VIEWPORT, SAPPHIRE CONCEPT 1 | NOVELLUS | 15-110411-00 | Sapphire | 260.35*76.2*6.35T | |
21 | Window Sapphire / WINDOW, 2.75 DIA, SAPPHIRE, DPS CHAMBER | AMAT | 0200-35957 | Sapphire | 2.75 Dia x .125 | |
22 | Sapphire plug | LAM | 716-331128-008 | Sapphire | ||
23 | Window Depo SAF 0.5 | TEL | 1D10-406499-11 | Sapphire | ||
24 | Sapphire Tube Replacement Kit | AMAT | 3750-01144 | Sapphire | ||
25 | PIN,MCA,SAPH,3/16DIA,0.8147IN,1 FLAT END | NOVELLUS | 15-391861-32 | Sapphire | all length & shape possible | |
26 | SHIM, LIFT PIN, THICKNESS, SAPPHIRE LIFT PIN, THICKNESS, SAPPHIRE | NOVELLUS | 15-260932-07-B | Sapphire | ||
27 | Mount sensor | NOVELLUS | 15-11084-00 | Sapphire | ||
28 | Sapphire Pin Pusher Adjustment | TEL | 2L10-358376-11 | Sapphire | D2.99*112.6L | |
29 | Top Nozzle HDP CVD Ultima NOZZLE 4HOLE 60DEG, BAFFLE ULTIMA HDP-CVD | AMAT | ULTIMA | 0200-01009 | Al2O3 | |
30 | 300mm HDP ALN 8 holes top nozzle Baffle, aln, 2.470dx1.14l, 8x.100cln,8x | AMAT | 0200-04294 | AlN | ||
31 | Gas Injector | LAM | 2300 Versys Kiyo 300mm | 716-082886-006 | Y2O3 | |
32 | NOZZLE, ALN, 1.76L X .14DIA -N | AMAT | Centura AP Ultima X 300mm HDP-CVD | 0200-04988 | AlN->Sapphire | |
33 | ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.14DIA, 100% FLOW | AMAT | Centura AP Ultima X 300mm HDP-CVD | 0200-05081 | AlN->Sapphire | any gas flow possible |
34 | ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.20DIA, 100% FLOW | AMAT | Centura AP Ultima X 300mm HDP-CVD | 0200-05086 | AlN->Sapphire | any gas flow possible |
35 | ULTIMA-X SIDE NOZ ZLE, ALN, 2.55LX0.20DIA, 100% FLOW | AMAT | Centura AP Ultima X 300mm HDP-CVD | 0200-05091 | AlN->Sapphire | any gas flow possible |
36 | ULTIMA-X SIDE NOZ ZLE, ALN, 2.28LX0.14DIA, 100% FLOW | AMAT | Centura AP Ultima X 300mm HDP-CVD | 0200-05112 | AlN->Sapphire | any gas flow possible |
37 | INJECTOR TUBE STAR INSERT 1.375 | NOVELLUS | SPEED HDP-CVD | 15-278968-00 | Sapphire | |
38 | NOZ, GAS NJ, 8-HOLE QTZ, 200ME | LAM | 716-008718-001 | Quartz->Sapphire | ||
39 | INJ, DUAL, FACSEAL, IEP, HNYCMB, CER | LAM | 716-057993-003 | Y2O3, Sapphire | ||
40 | INJ, DUAL, FACSEAL, IEP, HNYCMB, CER | LAM | 716-057993-335 | Y2O3, Sapphire | ||
41 | HPQ injector NOZ, INJ, 8X,0.55-45DE | AMAT | 2300 Versys Kiyo 300 | 716-012639-024 | l2O3, Quartz, Sapphire | |
42 | Window Shield Depo Y1-E(Ceramic) | TEL | 1D10-315649-12 | Al2O3 | ||
43 | RING INSULATOR B3(CERAMIC) | TEL | 1D10-30410-12 | Al2O3 | ||
44 | Assy. Holder, MOER Ring | NOVELLUS | 02-054574-00 | Al2O3 | ||
45 | GUIDE, LIFT PIN | AMAT | 0200-18053 | Al2O3 | ||
46 | LIFT PIN, CERAMIC, LONG | AMAT | 0200-40156 | Al2O3 | ||
47 | BUSHING UPPER SHIELD UPPER INS | AMAT | 0200-00590 | Al2O3 | ||
48 | HOUSING DOUBLE RF CONN 300MM SIP ENCORE | AMAT | 0200-07448 Re.4 | Al2O3 |
Wednesday, May 29, 2019
AMAT ceramic or quartz covers and rings etc
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