Wednesday, May 29, 2019

AMAT ceramic or quartz covers and rings etc






Semixicon  Available Part Number List for semi                                          sales@semixicon.com
NO Description Equipment P/N Material Size
1 8” FOCUS RING TEL DRM2 1D10-309946-12 Silicon(Ring) 8"
2 Focus Inner 8” Notch C TEL Unity2E-851EM 1810-323881-14 Silicon(Ring) 8"
3 8” FOCUS RING TEL DRM2 1D10-309946-12 Silicon(Ring) 8"
4 Collar 300mm, 5.4mm Producer Etch AMAT   0200-03575 Silicon(Ring) 12"
5 Focus Ring TEL RBM 2L10-255346-11 Silicon(Ring) 12"
6 INSERT RING, SILICON 200MM NOTCH(2) AMAT   0200-01239 Silicon(Ring) 8"
7 LIFT PIN QUARTZ W/CAPTURING 300MM PRODUCER RPA WCLN AMAT   0200-23879 Rev.01 Quartz  
8 Window, Upper Qall EPD(H)(QUARTZ) TEL   1D05-400101-11 Quartz  
9 GLASS PLATE, EPD(QUARTZ) TEL   1D10-409580-11 Quartz  
10 RING INSULATOR B2(QUARTZ) TEL   1D05-300053-14 Quartz 8"
11 RING INSULATOR A7(QUARTZ) TEL   1D05-300052-13 Quartz 8"
12 WINDOW FRONT MICROWAVE REMOTE PLASMA AMAT   0200-09952 Sapphire D127*9.144T
13 WINDOW, SAPPHIRE, SIDE, CHAMBER AMAT   0200-10100 Sapphire D17.27*3.18T
14 Window Slit sapphire AMAT   0200-00249 Sapphire 88.9*18.54*6.35T
15 WINDOW, IEP 300MM DPS2 (sapphire) AMAT   0200-01195 Sapphire D15.83*3.18T
16 WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ AMAT   0200-09969 Sapphire D17.27*3.18T
17 IEP Window Sapphire Gas Injector LAM 2300 Versys Kiyo 300mm 716-008608-001 Sapphire D25*0.87T
18 WDO SAPPHIRE LENS 25MM DIA X 2MM THK AMAT   3440-01037 Sapphire D25*1T
19 WINDOW, SAPPHIRE, PUMPING PLATE AMAT   0200-09970 Sapphire D40.64*3.05T
20 Window Sapphire / VIEWPORT, SAPPHIRE CONCEPT 1 NOVELLUS   15-110411-00 Sapphire 260.35*76.2*6.35T
21 Window Sapphire / WINDOW, 2.75 DIA, SAPPHIRE, DPS CHAMBER AMAT   0200-35957 Sapphire 2.75 Dia x .125
22 Sapphire plug LAM   716-331128-008 Sapphire  
23 Window Depo SAF 0.5 TEL   1D10-406499-11 Sapphire  
24 Sapphire Tube Replacement Kit AMAT   3750-01144 Sapphire  
25 PIN,MCA,SAPH,3/16DIA,0.8147IN,1 FLAT END NOVELLUS   15-391861-32 Sapphire all length & shape possible
26 SHIM, LIFT PIN, THICKNESS, SAPPHIRE LIFT PIN, THICKNESS, SAPPHIRE NOVELLUS   15-260932-07-B Sapphire  
27 Mount sensor NOVELLUS   15-11084-00 Sapphire  
28 Sapphire Pin Pusher Adjustment TEL   2L10-358376-11 Sapphire D2.99*112.6L
29 Top Nozzle HDP CVD Ultima NOZZLE 4HOLE 60DEG, BAFFLE ULTIMA HDP-CVD AMAT ULTIMA 0200-01009 Al2O3  
30 300mm HDP ALN 8  holes top nozzle Baffle, aln, 2.470dx1.14l, 8x.100cln,8x AMAT   0200-04294 AlN  
31 Gas Injector LAM 2300 Versys Kiyo 300mm 716-082886-006 Y2O3  
32 NOZZLE, ALN, 1.76L X .14DIA -N AMAT Centura AP Ultima X 300mm HDP-CVD 0200-04988 AlN->Sapphire  
33 ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.14DIA, 100% FLOW AMAT Centura AP Ultima X 300mm HDP-CVD 0200-05081 AlN->Sapphire any gas flow possible
34 ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.20DIA, 100% FLOW AMAT Centura AP Ultima X 300mm HDP-CVD 0200-05086 AlN->Sapphire any gas flow possible
35 ULTIMA-X SIDE NOZ ZLE, ALN, 2.55LX0.20DIA, 100% FLOW AMAT Centura AP Ultima X 300mm HDP-CVD 0200-05091 AlN->Sapphire any gas flow possible
36 ULTIMA-X SIDE NOZ ZLE, ALN, 2.28LX0.14DIA, 100% FLOW AMAT Centura AP Ultima X 300mm HDP-CVD 0200-05112 AlN->Sapphire any gas flow possible
37 INJECTOR TUBE STAR INSERT 1.375 NOVELLUS SPEED HDP-CVD 15-278968-00 Sapphire  
38 NOZ, GAS NJ, 8-HOLE QTZ, 200ME LAM   716-008718-001 Quartz->Sapphire  
39 INJ, DUAL, FACSEAL, IEP, HNYCMB, CER LAM   716-057993-003 Y2O3, Sapphire  
40 INJ, DUAL, FACSEAL, IEP, HNYCMB, CER LAM   716-057993-335 Y2O3, Sapphire  
41 HPQ injector NOZ, INJ, 8X,0.55-45DE AMAT 2300 Versys Kiyo 300 716-012639-024 l2O3, Quartz, Sapphire
42 Window Shield Depo Y1-E(Ceramic) TEL   1D10-315649-12 Al2O3  
43 RING INSULATOR B3(CERAMIC) TEL   1D10-30410-12 Al2O3  
44 Assy. Holder, MOER Ring NOVELLUS   02-054574-00 Al2O3  
45 GUIDE, LIFT PIN AMAT   0200-18053 Al2O3  
46 LIFT PIN, CERAMIC, LONG AMAT   0200-40156 Al2O3  
47 BUSHING UPPER SHIELD UPPER INS AMAT   0200-00590 Al2O3  
48 HOUSING DOUBLE RF CONN 300MM SIP ENCORE AMAT   0200-07448 Re.4 Al2O3  


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