Ion Implanter - Roplat / Tilter Refurb & Repair
Ion Implanter
| Process | OEM | Model | Current |
|---|---|---|---|
| ION Implanter | Varian | E220 | Med Current Implanter |
| ION Implanter | Varian | E500HP | Med Current Implanter |
| ION IMPLANTER | VARIAN | E1000 | High Current Implanter |
| ION IMPLANTER | VARIAN | VIISION 80 | High Current Implanter |
| ION IMPLANTER | VARIAN | VIISION 200 | High Current Implanter |
| ION IMPLANTER | VARIAN | VIISTA 80 | High Current Implanter |
| ION IMPLANTER | AMAT | PI-9500 | High Current Implanter |
| ION IMPLANTER | AMAT | XR9500 | High Current Implanter |
| ION IMPLANTER | AMAT | XR80 | High Current Implanter |
| ION IMPLANTER | AXCELIS | GSD-200 | High Current Implanter |
| ION IMPLANTER | AXCELIS | GSD-HE | High Energy Implanter |
Roplat
| P/N | Description |
|---|---|
| E11139350 | Sensor Ass'y |
| E19283260 | Motor, Lift Motor |
| E35000514 | Seal, Lip, Fluor, 0.375 |
| - | BEARING (WA040XPO) |
| - | BEARING (WA040CPO) |
| E111422270 | FEEDTHRU, PLATEN |
| E11283690 | Roplat Tilt Motor |
| E11283230 | Encoder |
| E19014090 | Seal Hollow Side |
| E19014100 | Seal Load Side |
| E11130962 | Twist Motor |
| E11141161 | Roplat Tilt Ass'y |
| E11141162 | Roplat Tilt Ass'y |
| E11141163 | Roplat Tilt Ass'y |
| E11141164 | Roplat Tilt Ass'y |
Tilt
| P/N | Description |
|---|---|
| E11115361 | X-Tilt Ass'y |
| E1114753 | X-Tilt Motor |
| E11136680 | Lift Motor |
| E11128020 | Ribbon Cable |
| E42000275 | Bearing Ball, 2.5" |
| E42000 | Bearing Ball, 3" |
| E35000484 | Lip Seal |
Implanter ESC Type Varian E500, P/N E11098654
sales@semixicon.com
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