| No. | Description | Process | Model | OEM Code |
|---|---|---|---|---|
| 1 | 300mm 2-GAP Pedestal_R | PVD | INOVA | 02-300478-00-R |
| 2 | Assy Heater Block(101) | PVD | ENDURA | 0020-20125C |
| 3 | "Tin Heater Ass'y 6" | 0010-21530 | ||
| 4 | HTHU Heater Block 수리 | PVD | ENDURA | 0010-76154 |
| 5 | 8" A101 Heater (Repair) | PVD | ENDURA | 0010-21246 |
| 6 | 6" A101 Heater | PVD | ENDURA | 0010-21530 |
| 7 | 8" STD Heater Repair | (비어 있음) | ||
| 8 | Ass'y Heater Block(STD) 재생 | 0020-20125 | ||
| 9 | ESC. Pedestal, DT ESC MT, ENDURA 2, 300mm | PVD | 0010-49546 REV.004 | |
| 10 | Heater Assy 8" B101 | PVD | ENDURA | 0010-13626 |
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