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"DETAILED PROCESS" Equip. Maker Equip. Name OEM P/N DESCRIPTION MATERIAL AMAT 0020-10160 LINER CERAMIC CERAMIC AMAT 0020-01640 SHIELD,INSULATOR CERAMIC PVD AMAT ENDURA 5500 0020-20114 ISOLATOR DC BIOS CERAMIC AMAT 0020-20123 CERAMIC PVD AMAT ENDURA 5500 0020-20126 STAND OFF CERAMIC DC BIOS CERAMIC AMAT 0020-29164 INSULATOR BOTTOM ON CAPSULE CERAMIC AMAT 0022-48198 BUSH, CERAMIC AC PIN CERAMIC AMAT 0022-50202 TOP PLATE, DUMMY PUCK, MPVD CERAMIC AMAT 0022-50218 BOTTOM PLATE, DUMMY PUCK, MPVD CERAMIC AMAT 0022-50410 SPACER, DUMMY PUCK, MPVD CERAMIC AMAT 0022-52740 counter groove Tungsten AMAT 0022-64115 liner alumina CERAMIC ETCH AMAT DPS METAL 0200-00247 RING CAPTURE,195MM SNNF CERAMIC,DPS CERAMIC CVD AMAT P-5000 DXZ 0200-00296 SLEEVE JUNCTION SIN, DXZ CERAMIC AMAT 0200-00318 GUIDE LIFT PIN SST HEATER 300MM TXZ CERAMIC CVD AMAT CENTURA 5200 0200-00353 SPACER PIN WxZ+HEATER CERAMIC PVD AMAT ENDURA 5500 0200-00354 RING, PURGE WxZ +FC NOTCH CERAMIC CVD AMAT ULTIMA 0200-00576 PIN, WEIGHT 300MM HDP-CVD CERAMIC AMAT 0200-00635 NOZZLE, ALL CERAMIC 2.28L, 300MM HDP CVD CERAMIC AMAT 0200-00710 ISOLATOR, CERAMIC, WXZ EC CERAMIC AMAT 0200-00911 LABYRINTH FEEDTHRU COIL SUPORT ELECTRA CERAMIC AMAT 0200-01006 Dome for plus & TE CERAMIC AMAT 0200-01009 top nozzle CERAMIC AMAT 0200-01196 LIFT PIN FAST LIFT, ALUMINA NON-CONDUCTIVE,100DIA CERAMIC AMAT 0200-01197 LIFT PIN, ADJUST FAST LIFT, ALUMINA NON-CONDUCTIVE,100DIA CERAMIC AMAT 0200-01368 INJICTOR CERAMIC CAS eMAX SAMSUNG CERAMIC AMAT 0200-01798 PIN LIFT,TXZ HEATER SINGLE TAPER,CERAMIC CERAMIC AMAT 0200-01844 INJECTOR,GAS 12 HOLES, .020 DIA, 1.02 CERAMIC AMAT 0200-01845 INJECTOR, GAS, 12 HOLES, .020 DIA, 1.02 CERAMIC AMAT 0200-01904 PIN PEDESTAL ALIGNMENT CERAMIC 300MM PCII CERAMIC AMAT 0200-02113 BUSHING,UP,SHIELD,INS,300MM SIP ENCORE TA(N) CERAMIC AMAT E-MAX 0200-02116 INJECTION,GAS HOLES, .020 DIA , 1.02 LG 63RA, INNER CERAMIC AMAT E-MAX 0200-02117 INJICTOR GAS SEAL,BLANK-OFF,CERAMIC eMAX CERAMIC AMAT 0200-02121 INSULATOR FEEDTHRU,300MM SIP ENCORE TA(N) CERAMIC AMAT 0200-02139 PIN ,COVER CAPTIVE SCREW,300MM SIP ENCORE TA(N) CERAMIC AMAT 0200-02145 CAP,COIL SUPPORT ,300MM SIP ENCORE TA(N) CERAMIC AMAT 0200-02781 PIN, LIFT, PRODUCERE CERAMIC AMAT DPS METAL 0200-04131 CAPTURE RING CERAMIC AMAT 0200-04132 FOCUS RING CERAMIC AMAT 0200-06404 LID CERAMIC DUAL GAS FEED 300MMDPS 232 CERAMIC CVD AMAT P-5000 DXZ 0200-09035 PIN, WAFER LIFT CERAMIC AMAT 0200-09046-2-CP01 ARM PAD CERAMIC AMAT 0200-09046-3-CP01 ARM PIN CERAMIC AMAT 0200-09046-CP01 ARM SUSCEPTOR CERAMIC CVD AMAT DSM 0200-09071 PIN WAFER LIFT 200MM CERAMIC CVD AMAT P-5000 DXZ 0200-09147 PIN WAFER LIFT 150 WB CERAMIC AMAT 0200-09240--2-CP01 ARM PAD CERAMIC AMAT 0200-09240-CP01 SUPPORT ATM SUSCEPTOR, 200MM CERAMIC AMAT 0200-09240-CP01 ARM PIN CERAMIC AMAT 0200-09384 PIN WAFER LIFT UNIVERSAL CHAMBER, 150 MM CERAMIC CVD AMAT 0200-09414 COLLAR .271 SUS BWCVD CERAMIC CVD AMAT 0200-09415 BUSHING .271 SUS BWCVD CERAMIC AMAT 0200-09452 ARM, T2WELDED SUSCEPTOR CERAMIC AMAT 0200-09575 PIN, WAFER LIFT, REV1 CERAMIC HOOP, 200MM CERAMIC BWCVD AMAT 0200-09614 PIN, LIFT WAFER 200MM BWCVD CERAMIC CVD AMAT CENTURA 5200 0200-09716 PIN LIFT, HEATER WxZ CERAMIC ETCH AMAT P5000 METAL 0200-09735 COVER,CLAMPING RING, 150MM CERAMIC AMAT 0200-09757 RING CERAMIC ETCH AMAT P5000 METAL 0200-09759 SHIELD,150MM,PEDESTAL,AL,FINGER CERAMIC CVD AMAT 0200-09886 FINGER "6" MCVD CERAMIC CVD AMAT P5000 0200-09933 PIN, WAFER LIFT, HEATER CERAMIC AMAT 0200-09951 PAD WAFER LIFT RING WXZ CERAMIC AMAT 0200-09974 DXZ TEOS PUMPING RING CERAMIC AMAT METAL ETCH 5000 0200-10027 RING, INNER, 1.50", SGD CERAMIC AMAT 0200-10117 ARM CERAMIC DXZ AMAT 0200-10143 Insert, Ring Ceramic, DXZ Chamber CERAMIC AMAT 0200-10144 Teos isolator CERAMIC AMAT 0200-10157 LINER, JUNCTION CERAMIC CVD AMAT CENTURA 5200 DXZ SION 0200-10158 OBS SLEEVE, JUNCTION SIN, DXZ CERAMIC CVD AMAT CENTURA 5200 DXZ SION 0200-10163 ISOLATOR, Sin ENHANCED, PUMPING LID, DXZ CERAMIC AMAT 0200-10164 SIN PUMPING INSERT CERAMIC AMAT 0200-10169 EDGE RING CERAMIC AMAT 0200-10192 Ring focus ESC 8'' CERAMIC AMAT 0200-10204 PIN, WAFER LIFT, UNIV CH, METAL HOOP, 150 mm, P-CHUCK CERAMIC AMAT 0200-10284 LIFT PIN CERAMIC AMAT 0200-10286 LIFT RING CERAMIC AMAT 0200-10676 SUPPORT SUSCEPTOR 150MM TO/SO/N CERAMIC AMAT 0200-17666 WAFER NAILHEAD LIFT PIN, 300MM CATHODE DS CERAMIC AMAT 0200-17725 CATHODE LINER SCREW COVER SAMURAI CERAMIC HDPCVD AMAT DSM 0200-18053 GUIDE LIFT PIN CERAMIC CVD AMAT ULTIMA 0200-18081 COVER LOW PROFILE HDP-CVD, ULTIMA CERAMIC CVD AMAT ULTIMA 0200-18086 NOZZLE ALL CERAMIC .85L HDP-CVD, ULTIMA CERAMIC AMAT 0200-18090 cathode insulator CERAMIC CVD AMAT ULTIMA 0200-18093 NOZZLE ALL CERAMIC 2.55L, 1.5% HDP-CVD, ULTIMA CERAMIC CVD AMAT HDP 0200-18100 LIFT PIN CERAMIC 300MM, HDPCVD CERAMIC CVD AMAT ULTIMA 0200-18109 COLLAR 200mm SNNF SML FLT ULTIMA HDPCVD CERAMIC AMAT 0200-18701 SHADOW RING INSERT, DIA 297 MM, 210 GRAM - DS CERAMIC AMAT 0200-19002 SHADOW RING HEAT SHIELD. 2 - PCE RING - DS CERAMIC AMAT 0200-19003 Shadow Ring Carrier, 300 mm DS CERAMIC AMAT 0200-19038 SHADOW RING INSERT, DIA 295 MM, 210 GRAM - DS CERAMIC AMAT 0200-20123 CERAMIC AMAT VECTOR-IMP 0200-20215 HOUSING DOUBLE RF CONNECTORS,VECTRA-IMP CERAMIC PVD AMAT E-5500 VHP-TXZ 0200-20216 PIN COVER RF SCREW,VECTRA-IMP CERAMIC PVD AMAT E-5500 VHP-TXZ 0200-20315 REST BUTTON B101 VECTRA IMP CERAMIC AMAT IMP 0200-20439 INSULATOR RIGID COIL SUPPORT, ELECTRA-IMP CERAMIC AMAT IMP 0200-20440 REST BUTTON 300MM VECTRA IMP CERAMIC AMAT 0200-20441 SUCEPTOR CENTER, VENTED,PEDESTAL,B101 300MM CERAMIC AMAT 0200-20492 INSULATOR RECEPTACLE RIGID SUPPORT VECTRA-IMP,ICE CERAMIC AMAT 0200-21868 NOZZLE INSERT SG SOLID 300MM - DS CERAMIC AMAT 0200-22972 COVER RING (0.2mmEE) CERAMIC AMAT 0200-22973 Cover Ring (0.1mmEE) CERAMIC AMAT 0200-23049 Cover Ring (0.5MM EE), 150MM Wafer, 57.5MM Flat CERAMIC AMAT 0200-23094 FINGER LH 34MM HEIGHT CERAMIC AMAT 0200-23095 FINGER LH 26MM HEIGHT CERAMIC AMAT 0200-23096 FINGER RH 34MM HEIGHT CERAMIC AMAT 0200-23097 FINGER RH, 26MM HEIGHT CERAMIC AMAT 0200-23098 FINGER CENTER 34MM HEIGHT CERAMIC AMAT 0200-23099 FINGER CENTER 34MM HEIGHT CERAMIC AMAT 0200-23164 Shadow Ring Carrier, 200 mm DS CERAMIC AMAT 0200-23441 SHADOW RING INSERT, DIA 197 MM CERAMIC AMAT 0200-23655 RING, DEPOSITION, PVD W, CLEANCOAT ALUMINA 300 MM CERAMIC AMAT 0200-23665 SHADOW RING HEAT SHIELD. 2 - PCE RING - DS CERAMIC AMAT 0200-23666 FINGER SLIDING AL203 CERAMIC AMAT 0200-23849 SHADOW RING, 2.50 MM EDGE, NOTCH TSV, 300 MM CERAMIC AMAT 0200-23850 SHADOW RING, 3.00 MM EDGE, NOTCH TSV, 300 MM CERAMIC AMAT 0200-24716 300MM ESC LIFTING SCREW CAP CERAMIC AMAT 0200-24903 ESC INSULATOR, 300MM CATHODE DS CERAMIC AMAT 0200-24917 LIFT PIN GUIDE, ESC SAMURAI CERAMIC AMAT 0200-25446 BUSH, CERAMIC DC PIN CERAMIC AMAT 0200-25488 BUSH, CERAMIC DC PIN CERAMIC AMAT 0200-25506 CERAMIC ROD CENTERING CERAMIC AMAT 0200-25716 CERAMIC ROD CENTERING CERAMIC AMAT 0200-26107 ESC EDGE INSULATOR, CATHODE DS CERAMIC AMAT 0200-26129 ESC INSULATOR, 300MM CATHODE DS CERAMIC AMAT 0200-26199 CERAMIC ROD CENTERING CERAMIC AMAT 0200-26557 BOTTOM RING CERAMIC AMAT 0200-26558 TOP RING CERAMIC AMAT 0200-26738 ISOLATOR, CERAMIC, LOWK, 300MM PRODUCER CERAMIC AMAT 0200-27075 centering rod CERAMIC AMAT 0200-27124 SHADOW RING INSERT, DIA 196 MM CERAMIC AMAT 0200-27135 REWORK, ADAPTER CERAMIC AMAT 0200-27235 SHADOW RING HEAT SHIELD DIA 196MM - DS CERAMIC AMAT 0200-27286 CERAMIC AMAT 0200-27287 CERAMIC AMAT 0200-27306 CERAMIC AMAT 0200-27489 SHADOW RING INSERT, DIA 297 MM - DS CERAMIC AMAT 0200-27490 Shadow Ring Carrier, 200 mm DS CERAMIC AMAT 0200-27494 ALN DISC, 300MM NOTCHED CERAMIC AMAT 0200-27495 ALN DISC, 500MM CERAMIC AMAT 0200-27497 ALN DISC, 501MM CERAMIC AMAT 0200-27588 ALN CENTERFEED BAFFLE, PRESIDIO CERAMIC AMAT 0200-27591 ALN 500MM DISC, 3MM THICK CERAMIC AMAT 0200-27642 CENTERFEED BAFFLE, PRESIDIO CERAMIC AMAT 0200-29164 INSULATOR BOTTOM ON CAPSULE CERAMIC Metal Etching AMAT DPS METAL 0200-35290 HOUSING, GAS FEED NOZZLE DPS MEC CHAMBER CERAMIC Metal Etching AMAT DPS METAL 0200-35291 PLUG, INNER, GAS FEED ASSY, DPS A1 CERAMIC Poly etching AMAT DPS POLY 0200-35295 HOUSING, GAS FEED DPS POLY CERAMIC Poly etching AMAT DPS POLY 0200-35296 PLUG,INNER,GAS FEED ASSY,DPS PC CERAMIC AMAT DPS METAL 0200-35323 RING,CAPTURE 195MM SEMI NOTCH NO FLAT CERAMIC DPS CHAMBR CERAMIC AMAT 0200-35702 CXZ EDGE RING CERAMIC AMAT DSM 0200-36373 LIFT PIN .149 DIA TRIANGULAR CERAMIC AMAT 0200-36415 C-SHAPE RING CERAMIC AMAT 0200-36416 BOTTOM RING CERAMIC AMAT 0200-36418 COVER PUMPING RING CERAMIC AMAT 0200-36428 TUBE CERAMIC GAS FEED,MICROWAVE CLEAN CERAMIC AMAT 0200-36630 PLATE, COVER, 8'' HEATER, DxZ ALUMINUM NITRIDE CERAMIC AMAT 0200-36631 PLATE, COVER, 8'' HEATER, DxZ ALUMINUM NITRIDE CERAMIC AMAT 0200-36649 LIFT RING CERAMIC AMAT 0200-36666 isolator ceramic CERAMIC AMAT OXIDE ETCH 5000 0200-36699 LIFT PIN FAST LIFT, ALUMINA NON-CONDUCTIVE CERAMIC AMAT OXIDE ETCH 5000 0200-36700 LIFT PIN, ADJUST FAST LIFT, ALUMINA NON-CONDUCTIVE CERAMIC AMAT 0200-39140 RING,FOCUS, 195MM SNNF 1", 60DEG, DPS CERAMIC AMAT 0200-39324 CHM INSERT CERAMIC AMAT 0200-39361 PRODUCER PUMPING RING CERAMIC Oxide etching AMAT HDP 0200-40156 LIFT PIN, CERAMIC, LONG CERAMIC AMAT 0200-71871 ROLLER LIFT PIN 15K/25K CERAMIC AMAT 0200-71872 PIN, ROLLER BUSHING 15K/25K CERAMIC AMAT 0200-71873 PIN END GROOVED ROLLER BUSHING 15K/25K CERAMIC AMAT 0200-71880 BUSHING ROLLER, LIFT PIN15K/25K CERAMIC AMAT 0200-71894 ROLLER LIFT PIN 15KP & 40K CERAMIC AMAT 0200-72122 CERAMIC AMAT 0200-76048 CERAMIC WASHER FINGER INSULATOR 101 HOOP CERAMIC AMAT 0270-11512 DUMMY, PUCK PLATE, MPVD CERAMIC