SEMIXICON Hightemp ®
Porous Ceramic Chuck Table
High Temperature Tolerant Porous
Ceramic Chuck Table
Solid
SiC Ceramic
Base + Porous SiC Ceramic Insert
NO GLUE USED ,HIGH TEMPERATURE TOLERENT (600ºC)
Strong
Acid Alkali Resistance
Excellent Thermal Conductivity （170.0W/(m・K)）!
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