DESCRIPTION | PN | EQUIPMENT MODEL | |
SHOWER HEAD,QUARTZ | A06-005-01 | GaSonics-A1000 | |
QUARTZ,DIFFUSION DISK | A06-012-01 | GaSonics-A1000 | |
CHAMBER WINDOW,VENTED | A06-001-01 | GaSonics-A1000 | |
Window A1000 | A06-002-01 | GaSonics-A1000 | |
PLASMA TUBE | A06-010-01 | GaSonics-A1001 | |
SHOWER HEAD,QUARTZ | A06-005-01 | GaSonics-A1000 | |
QUARTZ,DIFFUSION DIS | A06-012-01 | GaSonics-A1000 | |
CHAMBER WINDOW,VENTED | A06-001-01 | GaSonics-A1000 | |
Window A1000 | A06-002-01 | GaSonics-A1000 | |
PLASMA TUBE | A06-010-01 | GaSonics-A1001 | |
SHADOW RING | 0200-10243 | AMAT P5000 | |
0UTER RING | 0200-09610 | AMAT P5000 | |
FOCUS RING | 0200-09557 | AMAT P5000 | |
EDGE RING | 0200-09558 | AMAT P5000 | |
CHAMBER WINDOW | 0200-09158 | AMAT P5000 | |
PEDESTAL RING | 0200-09216 | AMAT P5000 | |
HR-6C-02/GAS DISTRIBUTION PIATE | 17688-01 | GaSonics-L3510 | |
PLATE DIFFUSER-QTZ LAMP | 17622-01 | GaSonics-L3510 | |
PLATE QTZ LAMP | 16532-01 | GaSonics-L3510 | |
PLATE QTZ LAMP | 17622-01 | GaSonics-L3510 | |
CHAMBER PLASMA QTZ | 06-0091 | GaSonics-L3510 |
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