Wednesday, April 1, 2020

SPARE PARTS FOR GASONICS

DESCRIPTION PN EQUIPMENT MODEL
SHOWER HEAD,QUARTZ A06-005-01 GaSonics-A1000
QUARTZ,DIFFUSION DISK A06-012-01 GaSonics-A1000
CHAMBER WINDOW,VENTED A06-001-01 GaSonics-A1000
Window A1000 A06-002-01 GaSonics-A1000
PLASMA TUBE A06-010-01 GaSonics-A1001
SHOWER HEAD,QUARTZ A06-005-01 GaSonics-A1000
QUARTZ,DIFFUSION DIS A06-012-01 GaSonics-A1000
CHAMBER WINDOW,VENTED A06-001-01 GaSonics-A1000
Window A1000 A06-002-01 GaSonics-A1000
PLASMA TUBE A06-010-01 GaSonics-A1001
SHADOW RING 0200-10243 AMAT P5000
0UTER RING 0200-09610 AMAT P5000
FOCUS RING 0200-09557 AMAT P5000
EDGE RING 0200-09558 AMAT P5000
CHAMBER WINDOW 0200-09158 AMAT P5000
PEDESTAL RING 0200-09216 AMAT P5000
HR-6C-02/GAS DISTRIBUTION PIATE 17688-01 GaSonics-L3510
PLATE DIFFUSER-QTZ LAMP 17622-01 GaSonics-L3510
PLATE QTZ LAMP 16532-01 GaSonics-L3510
PLATE QTZ LAMP 17622-01 GaSonics-L3510
CHAMBER PLASMA QTZ 06-0091 GaSonics-L3510


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