Canon Stepper & Custom Wafer Chucks

Canon Stepper Wafer Chucksy
Stepper Models: 3000 series

• BG4-9724-000V 4" Flat SiC Ring Chuck
• BG4-9723-000V 4" Flat SiC Pin Chuck
• BG4-9725-000V 5" Flat SiC Pin Chuck
• BG4-8632-000V 6" Flat SiC Pin Chuck
• BG3-2428-000V 8" Notch SiC Pin Chuck
• BG3-2616-000V 8" Flat SiC Pin Chuck
• BY9-8373-000V Chuck Cleaning Tool

Stepper Models: MkIII/IV, 2000i1, 2500i2/i3

• VEN-0058-000V 4" Ceramic Ring Chuck
• VEN-0059-000V 5" Ceramic Ring Chuck
• VEN-0016-000V 6" Ceramic Ring Chuck
• VEN-0019-000V 8" Ceramic Ring Chuck
• VEN-0057-000V 4" Ceramic Pin Chuck
• VEN-0056-000V 5" Ceramic Pin Chuck
• VEN-0055-000V 6" Ceramic Pin Chuck
• VEN-0054-000V 8" Ceramic Pin Chuck

Custom Designed Vacuum Chucks