12 Inch Wafer Vacuum Chuck
Friday, February 10, 2017
Friday, February 3, 2017
Aluminum Nitride (AlN) Substrates Wafer
Aluminum Nitride (AlN) Substrates Wafer
www.chuck-table.com
Item
|
Unit
|
Type
|
||
AN-170
|
AN-200
|
|||
Dimension
|
inch
|
6"×6" (max)
|
||
2x2/4x4/6x6/8x8,12"×12"
(max)
|
||||
Thickness
|
mm
|
0.385/0.635/1.0/1.2
|
0.385≦ t ≦1.5
|
|
10.0 (max)
|
||||
Through hole
|
mm
|
≧φ0.1
|
≧φ0.1
|
|
Density
|
g/cm3
|
3.3-3.35
|
3.33-3.36
|
|
Thermal Conductivity
|
W/(m.k))
|
170-190
|
>200
|
|
www.chuck-table.com
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