Ceramic plate and ring for polishing sapphire wafer
We supply customers ceramic plates for CMP polishing with various outer diameter and thickness.
This kind of table could be used for CMP polishing of 3,4,5,6,8,12 inch wafer. it has advantages such as
high flatness and parallelism, compact and uniform microstructure and high cost performance
Spare parts of Ceramic plates and ring for polishing can be made according to customers’ requirement
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