Wafer Chuck

www.chuck-table.com

THERMOPLUG 326 3805-220014-12

THERMOPLUG 326 3805-220014-12
http://www.semixicon.com

Same or better quality,big savings,prompt shipment and generous warranty,still difficult to make a purchasing decision?

Ceramic Components for Wafer Processing

Ceramic Components for Wafer Processing

Semiconductor wafer back grinding chuck table

Semiconductor wafer back grinding chuck table

www.semixicon.com

AlN Substrate Aluminium Nitride Wafer

High thermal conductivity  AlN Ø100*1.0 wafer made by semiXicon

www.semixicon.com

Type 1:

Dimension: 7.5"X5.5"X0.635mm+/-0.15

Thickness:0.635mm+/-0.05

Surface Roughness: 0.3-0.6

Thermal conductivity at 20 C: >180 W.M.K.

Type 2:

Dimension: 7.5"X5.5"X1.0mm+/-0.15

Thickness:1.0 mm+/-0.05

Surface Roughness: 0.3-0.6

Thermal conductivity at 20 C: >180 W.M.K.

Semitransparent

The semiXicon aluminum nitride (AlN) ceramic carries high thermal conductivity(5-10 times as the alumina ceramic), low dielectric constant and dissipation factor, good insulation and excellent mechanical properties, non-toxic, high thermal resistance, chemical resistance ,and the linear expansion coefficient is similar with Si,it goes with standard wafer sized such as 3,4,5,6,8

Porous Ceramic Vacuum Chuck Expert---semiXicon

Porous Ceramic Vacuum Chuck Expert---semiXicon

www.semixicon.com

LAM

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