SiC & SiSiC Wafer Chuck Table
SemiXicon wafer chucks made of SiC or SiSiC has superior rapid cooling and heating resistance ,wear resistance,extra long service life etc properties, it is almost the lightest ,but also the hardest ceramic material with similar thermal expansion rate with silicon etc compound wafers ,plus it is very resistant to acids and chemicals ,this makes it an excellent choice in some harsh wafer handling process
