Repair the chuck unrepairable,accomplish the mission impossible

We are repairing the below chuck table which DISCO is discontinuing to repair due to various of reasons:

ﾁｬｯｸﾃｰﾌﾞﾙ Chuck table	FKWK-160004	ﾎｯﾄﾃ-ﾌﾞﾙASSY(HP306)	HOT TABLE ASSY(HP306)
	FKWK-180001	ﾎｯﾄﾃ-ﾌﾞﾙASSY(HC328)	HOT TABLE ASSY(HC328)
	FRDB-010012	ﾁｬｯｸﾃ-ﾌﾞﾙ(HC)	CHUCK TABLE(HC)
	FRDB-010013	ﾁｬｯｸﾃ-ﾌﾞﾙ(HC)	CHUCK TABLE(HC)
	LDDN-910005	ﾁﾔﾂｸ ﾃｰﾌﾞﾙ (ﾕﾆﾊﾞｰｻﾙ)	CHUCK TABLE (UNIVERSAL)
	FELS-910012	SPINNER TABLE	SPINNER TABLE
	LKRH-010028	ﾄﾗﾝｽﾌｱ- ﾃ-ﾌﾞﾙ(ﾒﾀﾙ ﾒﾂ	TRANSFER TABLE (METAL MESH)
	LPFB-510009	ﾁｬｯｸﾃ-ﾌﾞﾙ(UNV190X190)	CHUCK TABLE(UNV190X190)
	MODDN005	ﾁﾔﾂｸ ﾃ-ﾌﾞﾙ	CHUCK TABLE
	MAENR012	ﾃｰﾌﾞﾙ ASSY	TABLE ASSY
	FELS-910012	SPINNER TABLE	SPINNER TABLE

Repair the chuck unrepairable,accomplish the mission impossible

www.semixicon.com

www.chuck-table.com

Aluminium Nitride

High thermal conductivity (170-230W/mK), up to 9.5 times than that of Alumina Similar coefficient of thermal expansion to that of silicon (Si). This helps to      achieve high reliability of Si chip and thermal heat cycling Higher electric insulation, and Smaller dielectric constant Higher mechanical strength (450MPa). Superior corrosion resistance against molten metal. Very high purity, no toxicity

 AlN Property Characteristics

Item / Unit				Type
				AN-170	AN-200	AN-230
Color			-	Grey	Grey	Beige
Material				AlN	AlN	AlN
Reflectivity			%	-	-	-
Bulk density			g/cm3	3.30	3.28	3.25
Surface roughness			µm	0.3	0.5	-
Mechanical  characteristic	3-point bending strength		MPa	450	400	300
	Young's modulus		GPa	320	320	-
	Vickers hardness		GPa	11	11	-
Thermal  characteristic	Coefficient of  thermal expansion	40-400℃	×10-6/K	4.8	4.8	4.8
		40-800℃	×10-6/K	5.4	5.4	5.4
	Thermal  conductivity	25℃	W/(m・K)	180	200	230
		300℃	W/(m・K)	120	130	145
	Specific heat		J/(kg・K)	720	720	720
Electric  characteristic	Dielectric constant	1MHz	-	9.0	9.0	9.0
	Dielectric Loss	1MHz	×10-4	3	3	3
	Volume resistivity	25℃	Ω・cm	> 1014	> 1013	> 1013
		300℃	Ω・cm	1010	109	109
		500℃	Ω・cm	108	107	107
	Dielectric breakdown voltage		kV/mm	> 15	> 15	> 15

Aluminium Nitride (AlN) Ceramic

 Aluminium nitride characteristics include:

• Very good thermal conductivity
• Thermal expansion coefficient similar to that of Silicon
• Good dielectric properties
• Good corrosion resistance
• Stability in semiconductor processing atmospheres

AlN Ceramic Disc

Diameter : 6 inch

Thickness: 18mm

Lead time: in stock

MOQ:        1 nos

Price:  sales@semixicon.com

www.semixicon.com