Property Index of AIN (Aluminum Nitride) Wafer

Property Index of AIN substractes
Property Sort	Property Content		Unit	Property Index
Basic Properties	Appearance/color		-	Gray
	Water absorption		%	0
	Volume density		g/cm3	≥3.30
	Surface roughness		μm	0.3-0.6
	Camber		(length ‰)	≤2‰
Thermal Properties	Thermal conductivity（30℃）		W/m.k	≥180
	Thermal expansivity	20℃ to 300℃	x10-6/℃	4.4
		300℃ to 800℃	x10-6/℃	4.8
Mechanical     Properties	Flexural strength		MPA	≥450
	Modulus elasticity		Gpa	320
	Moh's hardness		-	8
Electrical Properties	Dielectric constent(1MHz25℃)		-	8.9
	Dielectric loss(1MHz25℃)		x10-4	2.8
	Dielectric strength		KV/MM	≥17
	Volume resistivity		Ω.cm	≥1014
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AlN Ceramic Property				Rev.1.1