Transparent Silicon Nitride

AMAT ceramic or quartz covers and rings etc

Semixicon  Available Part Number List for semi                                          sales@semixicon.com
NO	Description	Equipment		P/N	Material	Size
1	8” FOCUS RING	TEL	DRM2	1D10-309946-12	Silicon(Ring)	8"
2	Focus Inner 8” Notch C	TEL	Unity2E-851EM	1810-323881-14	Silicon(Ring)	8"
3	8” FOCUS RING	TEL	DRM2	1D10-309946-12	Silicon(Ring)	8"
4	Collar 300mm, 5.4mm Producer Etch	AMAT		0200-03575	Silicon(Ring)	12"
5	Focus Ring	TEL	RBM	2L10-255346-11	Silicon(Ring)	12"
6	INSERT RING, SILICON 200MM NOTCH(2)	AMAT		0200-01239	Silicon(Ring)	8"
7	LIFT PIN QUARTZ W/CAPTURING 300MM PRODUCER RPA WCLN	AMAT		0200-23879 Rev.01	Quartz
8	Window, Upper Qall EPD(H)(QUARTZ)	TEL		1D05-400101-11	Quartz
9	GLASS PLATE, EPD(QUARTZ)	TEL		1D10-409580-11	Quartz
10	RING INSULATOR B2(QUARTZ)	TEL		1D05-300053-14	Quartz	8"
11	RING INSULATOR A7(QUARTZ)	TEL		1D05-300052-13	Quartz	8"
12	WINDOW FRONT MICROWAVE REMOTE PLASMA	AMAT		0200-09952	Sapphire	D127*9.144T
13	WINDOW, SAPPHIRE, SIDE, CHAMBER	AMAT		0200-10100	Sapphire	D17.27*3.18T
14	Window Slit sapphire	AMAT		0200-00249	Sapphire	88.9*18.54*6.35T
15	WINDOW, IEP 300MM DPS2 (sapphire)	AMAT		0200-01195	Sapphire	D15.83*3.18T
16	WINDOW, SIDE, UV COATED, SAPPHIRE, DXZ	AMAT		0200-09969	Sapphire	D17.27*3.18T
17	IEP Window Sapphire Gas Injector	LAM	2300 Versys Kiyo 300mm	716-008608-001	Sapphire	D25*0.87T
18	WDO SAPPHIRE LENS 25MM DIA X 2MM THK	AMAT		3440-01037	Sapphire	D25*1T
19	WINDOW, SAPPHIRE, PUMPING PLATE	AMAT		0200-09970	Sapphire	D40.64*3.05T
20	Window Sapphire / VIEWPORT, SAPPHIRE CONCEPT 1	NOVELLUS		15-110411-00	Sapphire	260.35*76.2*6.35T
21	Window Sapphire / WINDOW, 2.75 DIA, SAPPHIRE, DPS CHAMBER	AMAT		0200-35957	Sapphire	2.75 Dia x .125
22	Sapphire plug	LAM		716-331128-008	Sapphire
23	Window Depo SAF 0.5	TEL		1D10-406499-11	Sapphire
24	Sapphire Tube Replacement Kit	AMAT		3750-01144	Sapphire
25	PIN,MCA,SAPH,3/16DIA,0.8147IN,1 FLAT END	NOVELLUS		15-391861-32	Sapphire	all length & shape possible
26	SHIM, LIFT PIN, THICKNESS, SAPPHIRE LIFT PIN, THICKNESS, SAPPHIRE	NOVELLUS		15-260932-07-B	Sapphire
27	Mount sensor	NOVELLUS		15-11084-00	Sapphire
28	Sapphire Pin Pusher Adjustment	TEL		2L10-358376-11	Sapphire	D2.99*112.6L
29	Top Nozzle HDP CVD Ultima NOZZLE 4HOLE 60DEG, BAFFLE ULTIMA HDP-CVD	AMAT	ULTIMA	0200-01009	Al2O3
30	300mm HDP ALN 8  holes top nozzle Baffle, aln, 2.470dx1.14l, 8x.100cln,8x	AMAT		0200-04294	AlN
31	Gas Injector	LAM	2300 Versys Kiyo 300mm	716-082886-006	Y2O3
32	NOZZLE, ALN, 1.76L X .14DIA -N	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-04988	AlN->Sapphire
33	ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.14DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05081	AlN->Sapphire	any gas flow possible
34	ULTIMA-X SIDE NOZ ZLE, ALN, 1.76LX0.20DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05086	AlN->Sapphire	any gas flow possible
35	ULTIMA-X SIDE NOZ ZLE, ALN, 2.55LX0.20DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05091	AlN->Sapphire	any gas flow possible
36	ULTIMA-X SIDE NOZ ZLE, ALN, 2.28LX0.14DIA, 100% FLOW	AMAT	Centura AP Ultima X 300mm HDP-CVD	0200-05112	AlN->Sapphire	any gas flow possible
37	INJECTOR TUBE STAR INSERT 1.375	NOVELLUS	SPEED HDP-CVD	15-278968-00	Sapphire
38	NOZ, GAS NJ, 8-HOLE QTZ, 200ME	LAM		716-008718-001	Quartz->Sapphire
39	INJ, DUAL, FACSEAL, IEP, HNYCMB, CER	LAM		716-057993-003	Y2O3, Sapphire
40	INJ, DUAL, FACSEAL, IEP, HNYCMB, CER	LAM		716-057993-335	Y2O3, Sapphire
41	HPQ injector NOZ, INJ, 8X,0.55-45DE	AMAT	2300 Versys Kiyo 300	716-012639-024	l2O3, Quartz, Sapphire
42	Window Shield Depo Y1-E(Ceramic)	TEL		1D10-315649-12	Al2O3
43	RING INSULATOR B3(CERAMIC)	TEL		1D10-30410-12	Al2O3
44	Assy. Holder, MOER Ring	NOVELLUS		02-054574-00	Al2O3
45	GUIDE, LIFT PIN	AMAT		0200-18053	Al2O3
46	LIFT PIN, CERAMIC, LONG	AMAT		0200-40156	Al2O3
47	BUSHING UPPER SHIELD UPPER INS	AMAT		0200-00590	Al2O3
48	HOUSING DOUBLE RF CONN 300MM SIP ENCORE	AMAT		0200-07448 Re.4	Al2O3

Quartz ceramic