ULTRA-FLAT CERAMIC VACUUM CHUCKS

  

Round type : Size 6", 8", 12"

Square Type : PCB, LCD

Universal Type : Order made

ULTRA-FLAT CERAMIC VACUUM CHUCKS 

Solutions Developed Specifically for Wafer Handling

Our ultra-flat ceramic vacuum wafer chucks improve yield management for semiconductor wafer processing. Low-surface-contact configurations minimize risk of back-side particles negatively affecting wafer geometry for precision applications. We offer:

• Ultra-flat capabilities


• Mirror polish


• Exceptionally lightweight


• High stiffness


• Low thermal expansion


• Large size capability – 300 mm and beyond


• Extreme wear resistance

High-Purity Materials Expertise
From powder production and basic forming to precision finishing and measurement, we produce high-quality, top-performance components. You'll find our materials:

• Reduce the effect of particulate contamination


• Offer ultra-clean purity


• Minimize wafer contact


• Resist corrosion in aggressive chemical cleaning

Typical applications include:

• Lithography


• Inspection


• Wafer cleaning


• Non-vacuum process chambe

semiXicon
www.chuck-table.com
wilson.wu@aol.com